Processing system and method for processing a flexible substrate and deposition apparatus

According to one aspect of the present disclosure, a processing system for processing a flexible substrate is provided. The processing system includes: a vacuum chamber; a transport system configured to guide the flexible substrate through the vacuum chamber along a substrate transportation path (P)...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GERTMANN, REINER, LOTZ, HANS GEORG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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