Scanning electron microscopy apparatus andmethod for imaging of a photomask through apellicle

Scanning electron microscopy apparatus andmethod for imaging of a photomask through apellicle

A system for imaging a sample through a protective pellicle is disclosed. The system includes an electron beam source configured to generate an electron beam and a sample stage configured to secure a sample and a pellicle, wherein the pellicle is disposed above the sample. The system also includes a...

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Hauptverfasser: DELGADO, GILDARDO, SCHULTZ, WILLIAM G, ROSE, GARRY A
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator DELGADO, GILDARDO
SCHULTZ, WILLIAM G
ROSE, GARRY A
description A system for imaging a sample through a protective pellicle is disclosed. The system includes an electron beam source configured to generate an electron beam and a sample stage configured to secure a sample and a pellicle, wherein the pellicle is disposed above the sample. The system also includes an electron-optical column including a set of electron-optical elements to direct at least a portion of the electron beam through the pellicle and onto a portion of the sample. In addition, the system includes a detector assembly positioned above the pellicle and configured to detect electrons emanating from the surface of the sample.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Scanning electron microscopy apparatus andmethod for imaging of a photomask through apellicle
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