A pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RENCKENS, THEODORUS JOHANNES ANTONIUS, HEEREN, ADRIANUS MARINUS WOUTER, JANSSENS, STEF MARTEN JOHAN, GOSEN, JEROEN GERARD, SCHELLENS, HENDRIKUS JOHANNES, LENSSEN, BO, CUYPERS, KOEN, CORTIE, ROGIER HENDRIKUS MAGDALENA, SRIVASTAVA, SUDHIR, EUMMELEN, ERIK HENRICUS EGIDIUS CATHARINA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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