Non-volatile memory (nvm) device in semiconductor-on-insulator ( soi) technology and method of fabricating an according device

The present disclosure provides in one aspect a semiconductor device including a substrate structure comprising an active semiconductor material formed over a base substrate and a buried insulating material formed between the active semiconductor material and the base substrate, a ferroelectric gate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FLACHOWSKY, STEFAN, TRENTZSCH, MARTIN, BEYER, SVEN, HENKE, AXEL
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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