Thermal processing apparatus and thermal processing method

An upper plate on which a substrate is placed is cooled or heated by a thermal processor. The temperature of the thermal processor is adjusted by a temperature adjuster. The temperature of the upper plate is detected. A control value that is to be applied to the temperature adjuster in order to main...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GOTO, SHIGEHIRO, FUKUMOTO, YASUHIRO, NISHI, KOJI, MOMMA, TORU, JO, KENICHIRO, TANAKA, ATSUSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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