Crystal growth apparatus with ceramic coating and methods for preventing molten material breach in a crystal growth apparatus

A method for preventing molten material breach in a crystal growth apparatus includes providing a chamber of the crystal growth apparatus which is coated with a ceramic material. The chamber can be coated on an interior surface to prevent damage to the chamber itself, which is made of steel, and to...

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Hauptverfasser: RAVI, BHUVARAGASMY G, SKELTON, DEAN C, LACKEY, DAVE, KHATTAK, CHANDRA P, CHARTIER, CARL, RAGHAVAN, PARTHASARATHY S
Format: Patent
Sprache:chi ; eng
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