K-nearest neighbor-based method and system to provide multi-variate analysis on tool process data

A server computer system creates a reference fingerprint for a first tool running a recipe. The server computer system uses reference data that pertains to the first tool performing within parameters to create the reference fingerprint. The reference fingerprint includes a target baseline and allowa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KRIL, THORSTEN, YANOVICH, ALEKSEY, CANTWELL, DERMOT
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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