Probe guide plate, semiconductor inspection apparatus and method of manufacturing probe guide plate

A probe guide plate used for a semiconductor inspection apparatus that inputs and outputs an electrical signal for inspecting an object via a probe needle, the probe guide plate includes a silicon substrate provided with a through hole that penetrates the silicon substrate from one surface to anothe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUJIHARA, KOSUKE, SHIMIZU, YUICHIRO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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