Wafer conveyor system and method of assembling a wafer conveyor system

The present disclosure provides a conveyor system adapted for conveying a wafer to be transported. The conveyor system includes at least one roller, at least one roller bearing adapted for rotatably holding the roller, and at least one wafer transport belt spanned over the roller. When the conveyor...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LAZZARA, SIMONE, PALADIN, MANUEL, VAZZOLER, MICHELE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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