Method for controlling a surface morphology of silicon nitride powders with a pressure of a nitrogen atmosphere

A method for controlling a surface morphology of silicon nitride powders with a pressure of a nitrogen atmosphere includes steps as follows. The pressure of the nitrogen atmosphere is controlled for conducting a nitridation reaction of the silicon powders so as to obtain the silicon nitride powders...

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Hauptverfasser: YANG, CHIA YING, TSAI, YA LU, HO, KUO CHEN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A method for controlling a surface morphology of silicon nitride powders with a pressure of a nitrogen atmosphere includes steps as follows. The pressure of the nitrogen atmosphere is controlled for conducting a nitridation reaction of the silicon powders so as to obtain the silicon nitride powders including [alpha]-phase silicon nitride powders and [beta]-phase silicon nitride powders, which is increasing the pressure of the nitrogen atmosphere for increasing the ratio of the [alpha]-phase silicon nitride powders or decreasing the pressure of the nitrogen atmosphere for decreasing the ratio of the [alpha]-phase silicon nitride powders. Therefore, the material cost and the energy consumption can be reduced, the operation can be simplified, and the production efficiency can be enhanced.