Plasma processing device and method of controlling heater temperature

A plasma processing apparatus is provided that converts a gas into plasma using a high frequency power and performs a plasma process on a workpiece using an action of the plasma. The plasma processing apparatus includes a processing chamber that can be depressurized, a mounting table that is arrange...

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Bibliographische Detailangaben
1. Verfasser: OOHASHI, KAORU
Format: Patent
Sprache:chi ; eng
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