TWI580935B

The invention relates to a UV light sensor produced in a CMOS method, comprising a substrate that has a surface, one or more sensor elements that detect radiation and are designed in said substrate, at least one passivation layer arranged over said substrate surface, and a functional layer that is a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SAENDIG, MATTHIAS, GOEPFERT, LARS, REICHEL, THOMAS, GARZAROLLI, MATTHIAS I, SCHIFFNER, LUTZ
Format: Patent
Sprache:chi
Schlagworte:
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