Apparatus for and method of irradiating light

Apparatus for and method of irradiating light

The invention provides a light irradiation device and a light irradiation method. Flare light can be irradiated to the main surface of a base material without light-transmitting plates comprising quartz glass and the like, and the volume of the space for irradiating flare light can be reduced. The l...

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Hauptverfasser: UENO, TAKASHI, SHIBUTA, KOJI
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator UENO, TAKASHI
SHIBUTA, KOJI
description The invention provides a light irradiation device and a light irradiation method. Flare light can be irradiated to the main surface of a base material without light-transmitting plates comprising quartz glass and the like, and the volume of the space for irradiating flare light can be reduced. The light irradiation device (1) forms a single closed space through the main surface of the base material (9) and a frame (30) forming an opening part (32) at one side being close to the main surface of the base material (9). Then a light irradiation part (20) arranged in the closed space irradiates flare light to the main surface (91) of the base material (9). Flare light can be irradiated to the main surface (91) of the base material (9) without light-transmitting plates comprising quartz glass and the like, and therefore energy loss of the flare light can be reduced, the manufacture cost of the light irradiation device (1) can be reduced. Furthermore, the volume of the space for irradiating the flare light can be re
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Apparatus for and method of irradiating light
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