Substrate processing apparatus

The invention discloses a robot for transmitting a substrate, a multi-chamber substrate processing apparatus employing the robot and a control method for the apparatus. The robot for transmitting a substrate comprises a substrate holder, a plurality of mechanical arms which enable the substrate hold...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HONG, SA IN, CHO, JU HYUN, SEO, HYUNG KWON, YOO, JONG HYUN, CHOI, MIN HO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!