Ground structure, and heater and chemical vapor deposition apparatus including the same

A ground structure is provided to avoid generation of arc between an elastic holder and a ground terminal by fixing both ends of an elastic holder surrounding a ground terminal so that the elastic holder is continuously attached to the ground terminal. A ground terminal(120) is inserted into a groun...

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Bibliographische Detailangaben

Hauptverfasser:	HEO, KANG-IL, CHOI, JEONG-DUCK, LEE, BUM-SUL, LEE, SEONG-MIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BOARDS, SUBSTATIONS, OR SWITCHING ARRANGEMENTS FOR THE SUPPLYOR DISTRIBUTION OF ELECTRIC POWER CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES
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