Ground structure, and heater and chemical vapor deposition apparatus including the same
A ground structure is provided to avoid generation of arc between an elastic holder and a ground terminal by fixing both ends of an elastic holder surrounding a ground terminal so that the elastic holder is continuously attached to the ground terminal. A ground terminal(120) is inserted into a groun...
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | A ground structure is provided to avoid generation of arc between an elastic holder and a ground terminal by fixing both ends of an elastic holder surrounding a ground terminal so that the elastic holder is continuously attached to the ground terminal. A ground terminal(120) is inserted into a ground mount(110), capable of transferring. A conductive holder(130) grips the ground terminal, disposed in the ground mount. The conductive holder is electrically connected to the ground mount by a connection member(140). The ground mount can have a receiving groove for receiving the conductive holder. The receiving groove can be covered with an insulation cover. |
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