Method of manufacturing al and al alloy sputtering target
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| creator | CHEN, SHIH YING HSU, PO CHUN PENG, CHIA HSIANG YOUNG, CHUNE CHING LUO, REN AN TSENG, FAN CHUN TORNG, SHAN |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TWI296286BB</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TWI296286BB</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TWI296286BB3</originalsourceid><addsrcrecordid>eNrjZLD0TS3JyE9RyE9TyE3MK01LTC4pLcrMS1dIzFFIzEsBUzk5-ZUKxQWlJSWpYKmSxKL01BIeBta0xJziVF4ozc2g4OYa4uyhm1qQH59aXJCYnJqXWhIfEu5pZGlmZGHm5GRMhBIA4-MuwA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Method of manufacturing al and al alloy sputtering target</title><source>esp@cenet</source><creator>CHEN, SHIH YING ; HSU, PO CHUN ; PENG, CHIA HSIANG ; YOUNG, CHUNE CHING ; LUO, REN AN ; TSENG, FAN CHUN ; TORNG, SHAN</creator><creatorcontrib>CHEN, SHIH YING ; HSU, PO CHUN ; PENG, CHIA HSIANG ; YOUNG, CHUNE CHING ; LUO, REN AN ; TSENG, FAN CHUN ; TORNG, SHAN</creatorcontrib><language>chi ; eng</language><subject>CASTING ; CASTING OF METALS ; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; PERFORMING OPERATIONS ; POWDER METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; TRANSPORTING</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080501&DB=EPODOC&CC=TW&NR=I296286B$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080501&DB=EPODOC&CC=TW&NR=I296286B$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHEN, SHIH YING</creatorcontrib><creatorcontrib>HSU, PO CHUN</creatorcontrib><creatorcontrib>PENG, CHIA HSIANG</creatorcontrib><creatorcontrib>YOUNG, CHUNE CHING</creatorcontrib><creatorcontrib>LUO, REN AN</creatorcontrib><creatorcontrib>TSENG, FAN CHUN</creatorcontrib><creatorcontrib>TORNG, SHAN</creatorcontrib><title>Method of manufacturing al and al alloy sputtering target</title><subject>CASTING</subject><subject>CASTING OF METALS</subject><subject>CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>PERFORMING OPERATIONS</subject><subject>POWDER METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLD0TS3JyE9RyE9TyE3MK01LTC4pLcrMS1dIzFFIzEsBUzk5-ZUKxQWlJSWpYKmSxKL01BIeBta0xJziVF4ozc2g4OYa4uyhm1qQH59aXJCYnJqXWhIfEu5pZGlmZGHm5GRMhBIA4-MuwA</recordid><startdate>20080501</startdate><enddate>20080501</enddate><creator>CHEN, SHIH YING</creator><creator>HSU, PO CHUN</creator><creator>PENG, CHIA HSIANG</creator><creator>YOUNG, CHUNE CHING</creator><creator>LUO, REN AN</creator><creator>TSENG, FAN CHUN</creator><creator>TORNG, SHAN</creator><scope>EVB</scope></search><sort><creationdate>20080501</creationdate><title>Method of manufacturing al and al alloy sputtering target</title><author>CHEN, SHIH YING ; HSU, PO CHUN ; PENG, CHIA HSIANG ; YOUNG, CHUNE CHING ; LUO, REN AN ; TSENG, FAN CHUN ; TORNG, SHAN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TWI296286BB3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2008</creationdate><topic>CASTING</topic><topic>CASTING OF METALS</topic><topic>CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>PERFORMING OPERATIONS</topic><topic>POWDER METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CHEN, SHIH YING</creatorcontrib><creatorcontrib>HSU, PO CHUN</creatorcontrib><creatorcontrib>PENG, CHIA HSIANG</creatorcontrib><creatorcontrib>YOUNG, CHUNE CHING</creatorcontrib><creatorcontrib>LUO, REN AN</creatorcontrib><creatorcontrib>TSENG, FAN CHUN</creatorcontrib><creatorcontrib>TORNG, SHAN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHEN, SHIH YING</au><au>HSU, PO CHUN</au><au>PENG, CHIA HSIANG</au><au>YOUNG, CHUNE CHING</au><au>LUO, REN AN</au><au>TSENG, FAN CHUN</au><au>TORNG, SHAN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method of manufacturing al and al alloy sputtering target</title><date>2008-05-01</date><risdate>2008</risdate><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CASTING CASTING OF METALS CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS POWDER METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING |
| title | Method of manufacturing al and al alloy sputtering target |
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