Wafer transfer apparatus and transfer method

The purpose of the invention is to provide a wafer transfer apparatus and a method which can reduce a stress to a wafer, realizes simplification of the apparatus, and the temperature variation of the wafer is little. The wafer transfer apparatus is equipped with heat stages 20, 21, 22 on upper surfa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOMACHI, YASUYUKI, MOROE, HIROBUMI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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