Press device and method

The object of this invention is to have a film material embedded deeply in a concave section or hole of a substrate surface to prevent the formation of air bubbles in the concave section and hole, so as to planarize the film material. The solution of the present invention is a vacuum press device that includes a vacuum chamber (1) defined by a top housing member (2) and a bottom housing member (3). Top and bottom pressuring plates (12), (13) having heater plates (14), (17) are provided in the vacuum chamber (1). A substrate (10) having a surface on which a film material is positioned is pressed between the top and bottom pressuring plates (12), (13). One of the top and bottom pressuring plates (12), (13) is provided with a pressuring body (20). Top and bottom faces of the pressurizing body (20) are driven to move vertically by guiding a pressurizing fluid into the interior. The pressurization of the substrate (10) is achieved by the movement of the top and bottom faces of the pressurizing body (20). The reaction force of the pressurizing force is supported by the driving means (1) of the top and bottom pressuring plates. (12), (13) that has a rigid structure.