Both-side polishing carrier and production method therefor

A both-side polishing carrier (10) comprising a base material (10a) the material of which is, for example, stainless steel (SUS) as is before, and a coating layer (10b) harder than the base material (10a) to cover the base material (10a). The coating layer (10b) is preferably one that is even in thi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUGIMOTO, YUUJI, YAMASHITA, KENJI, OONO, YUKIO
Format: Patent
Sprache:eng
Schlagworte:
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