Displacement device

Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The m...

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Hauptverfasser: RENKENS, MICHAEL JOSEPHA MATHIJS, COMPTER, JOHAN CORNELIS, FOCKERT, GEORGE ARIE JAN DE, FRISSEN, PETRUS CAROLUS MARIA, COOLEN, ROB JACOBUS MATHEUS
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creator RENKENS, MICHAEL JOSEPHA MATHIJS
COMPTER, JOHAN CORNELIS
FOCKERT, GEORGE ARIE JAN DE
FRISSEN, PETRUS CAROLUS MARIA
COOLEN, ROB JACOBUS MATHEUS
description Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row (7) and each column (8) is rotated through 90 DEG counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45 DEG and the other type having an offset of -45 DEG with respect to the X-direction. The magnet configuration causes a very strong magnetic Held. The positioning device comprises a number of magnetically sensitive sensors (Hall sensors 45) giving a signal which depends on the local mutual positions of the permanent magnets of the first part relative to the electric coils of the second part in an area in which the parts overlap.
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subjects BASIC ELECTRIC ELEMENTS
CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
INSTRUMENT DETAILS
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title Displacement device
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