Method of synthesizing copper precursors
A method is provided for synthesizing relatively pure (hfac)Cu(I)L precursors which can be directly used for CVD copper thin film deposition applications without further purification. The new synthesis method can be applied to the synthesis of copper precursors having ligands such as 1-pentene or 1-...
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| creator | ZHUANG, WEI-WEI EVANS, DAVID RUSSELL HSU, SHENG TENG |
| description | A method is provided for synthesizing relatively pure (hfac)Cu(I)L precursors which can be directly used for CVD copper thin film deposition applications without further purification. The new synthesis method can be applied to the synthesis of copper precursors having ligands such as 1-pentene or 1-hexene. The synthesis method is based on providing a stoichiometric excess of Cu2O and L as initial reactants, compared to the amount of H(hfac) initially provided. The reaction is carried out at a low temperature, which reduces the occurrence of undesirable side-reactions that would reduce the purity of the copper precursor produced. The reaction has a large synthesis window which enhances the repeatability of the synthesis method so as to meet the requirements of large scale manufacturing production. |
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The new synthesis method can be applied to the synthesis of copper precursors having ligands such as 1-pentene or 1-hexene. The synthesis method is based on providing a stoichiometric excess of Cu2O and L as initial reactants, compared to the amount of H(hfac) initially provided. The reaction is carried out at a low temperature, which reduces the occurrence of undesirable side-reactions that would reduce the purity of the copper precursor produced. 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| subjects | ACYCLIC OR CARBOCYCLIC COMPOUNDS ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY ORGANIC CHEMISTRY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Method of synthesizing copper precursors |
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