PROCESS SHIELD FOR A SUBSTRATE PROCESSING CHAMBER

PROCESS SHIELD FOR A SUBSTRATE PROCESSING CHAMBER

【物品用途】;本設計所請求之用於基材處理室的處理遮罩件係用於在基材處理室中作為遮罩件。;【設計說明】;本案與第108304735號專利申請案(原設計)的差異在於：本案進一步主張位於物品中間層之開口結構。;圖式所揭露之虛線部分，為本案不主張設計之部分。...

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Hauptverfasser: Ｖ SANSONI, STEVEN V, KAMATH, ARAVIND, OR, DAVID, Ｈ VENKATASWAMAPPA, MANJUNATH H, Ｐ KOPPA, MANJUNATHA P, TSAI, CHENG-HSIUNG MATT
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creator Ｖ SANSONI, STEVEN V
KAMATH, ARAVIND
OR, DAVID
Ｈ VENKATASWAMAPPA, MANJUNATH H
Ｐ KOPPA, MANJUNATHA P
TSAI, CHENG-HSIUNG MATT
description 【物品用途】;本設計所請求之用於基材處理室的處理遮罩件係用於在基材處理室中作為遮罩件。;【設計說明】;本案與第108304735號專利申請案(原設計)的差異在於：本案進一步主張位於物品中間層之開口結構。;圖式所揭露之虛線部分，為本案不主張設計之部分。
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