A power distribution printed circuit board for a semiconductor processing system

A power distribution printed circuit board for a semiconductor processing system

A semiconductor processing system including a printed circuit board structure for delivering power to an assembly of radiant energy sources. The printed circuit board structure, in one configuration, forms an evacuable housing for the assembly of radiant energy sources.

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Hauptverfasser: STEFFAS, PAUL J, BOAS, RYAN C
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator STEFFAS, PAUL J
BOAS, RYAN C
description A semiconductor processing system including a printed circuit board structure for delivering power to an assembly of radiant energy sources. The printed circuit board structure, in one configuration, forms an evacuable housing for the assembly of radiant energy sources.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TW526524BB</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TW526524BB</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TW526524BB3</originalsourceid><addsrcrecordid>eNqFyrEKwkAMgOEuDqI-g3kBl2rdrSiODgXHcs2lEmgvR5JDfHsd3J1-PviX1f0EWV6kENlceSjOkiArJ6cIyIqFHQYJGmEUhQBGM6OkWNC_zipIZpyeYG9zmtfVYgyT0ebXVbW9XrrzbUdZerIckBJ53z2a-tjUh7bd_z8-EU83hQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>A power distribution printed circuit board for a semiconductor processing system</title><source>esp@cenet</source><creator>STEFFAS, PAUL J ; BOAS, RYAN C</creator><creatorcontrib>STEFFAS, PAUL J ; BOAS, RYAN C</creatorcontrib><description>A semiconductor processing system including a printed circuit board structure for delivering power to an assembly of radiant energy sources. The printed circuit board structure, in one configuration, forms an evacuable housing for the assembly of radiant energy sources.</description><edition>7</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2003</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20030401&amp;DB=EPODOC&amp;CC=TW&amp;NR=526524B$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20030401&amp;DB=EPODOC&amp;CC=TW&amp;NR=526524B$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>STEFFAS, PAUL J</creatorcontrib><creatorcontrib>BOAS, RYAN C</creatorcontrib><title>A power distribution printed circuit board for a semiconductor processing system</title><description>A semiconductor processing system including a printed circuit board structure for delivering power to an assembly of radiant energy sources. The printed circuit board structure, in one configuration, forms an evacuable housing for the assembly of radiant energy sources.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2003</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqFyrEKwkAMgOEuDqI-g3kBl2rdrSiODgXHcs2lEmgvR5JDfHsd3J1-PviX1f0EWV6kENlceSjOkiArJ6cIyIqFHQYJGmEUhQBGM6OkWNC_zipIZpyeYG9zmtfVYgyT0ebXVbW9XrrzbUdZerIckBJ53z2a-tjUh7bd_z8-EU83hQ</recordid><startdate>20030401</startdate><enddate>20030401</enddate><creator>STEFFAS, PAUL J</creator><creator>BOAS, RYAN C</creator><scope>EVB</scope></search><sort><creationdate>20030401</creationdate><title>A power distribution printed circuit board for a semiconductor processing system</title><author>STEFFAS, PAUL J ; BOAS, RYAN C</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW526524BB3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2003</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>STEFFAS, PAUL J</creatorcontrib><creatorcontrib>BOAS, RYAN C</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>STEFFAS, PAUL J</au><au>BOAS, RYAN C</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>A power distribution printed circuit board for a semiconductor processing system</title><date>2003-04-01</date><risdate>2003</risdate><abstract>A semiconductor processing system including a printed circuit board structure for delivering power to an assembly of radiant energy sources. The printed circuit board structure, in one configuration, forms an evacuable housing for the assembly of radiant energy sources.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
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source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title A power distribution printed circuit board for a semiconductor processing system
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-31T03%3A06%3A11IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=STEFFAS,%20PAUL%20J&rft.date=2003-04-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ETW526524BB%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true