Method for treating used electroplating solution

A method for treating a used electroplating solution is disclosed. By using an ozone/ultraviolet (UV)/additive system to treat the organic substances in the used electroplating solution, the organic substances can be decomposed and thus removed by the oxidation of ozone, which is a strong oxidant. T...

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Bibliographische Detailangaben
Hauptverfasser: LI, HOUNG, CHANG, CHING-YUAN, LEE, DUU-JONG, CHIU, CHUN-YU, YU, YUE-HWA+
Format: Patent
Sprache:eng
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