Station in position control equipment

Station in a position control equipment including an XY plate movably mounted on a base in an X direction and a Y direction, a first actuator coupled to XY plate titled by an angle with respect to the X direction, and a second actuator coupled to XY plate titled by an angle with respect to the Y dir...

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1. Verfasser: BAE, KEE-SUN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Station in a position control equipment including an XY plate movably mounted on a base in an X direction and a Y direction, a first actuator coupled to XY plate titled by an angle with respect to the X direction, and a second actuator coupled to XY plate titled by an angle with respect to the Y direction, wherein the first actuator and the second actuator are operative on the same time to move the XY plate in the X direction or the Y direction, thereby permitting to reduce a height between a base and a table, endure a heavier load, cope with an unbalanced load, enhance an accuracy of position control, and simplify station structure.