A method of sterilizing a ultrapure water delivery system in the semiconductor device fabrication process

There are provided a sterilizing composition comprising the mixture of hydrogen peroxide, peracetic acid and deionized water, a method of sterilizing a ultrapure water delivery system using the sterilizing composition and hot water, and a ultrapure water delivery system which is sterilized using the...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	HWANG, JUNG-SUNG, KIM, SUE-RYEON, KIM, SEUNG-UHN, OH, YUNUL
Format:	Patent
Sprache:	eng
Schlagworte:	AGRICULTURE ANIMAL HUSBANDRY BASIC ELECTRIC ELEMENTS BIOCIDES, e.g. AS DISINFECTANTS, AS PESTICIDES, AS HERBICIDES CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, ORSURGICAL ARTICLES CHEMISTRY DISINFECTION, STERILISATION, OR DEODORISATION OF AIR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FISHING FORESTRY HUMAN NECESSITIES HUNTING HYGIENE MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICALARTICLES MEDICAL OR VETERINARY SCIENCE METALLURGY METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS INGENERAL PERFORMING OPERATIONS PEST REPELLANTS OR ATTRACTANTS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PLANT GROWTH REGULATORS PRESERVATION OF BODIES OF HUMANS OR ANIMALS OR PLANTS OR PARTSTHEREOF SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING TRAPPING TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	There are provided a sterilizing composition comprising the mixture of hydrogen peroxide, peracetic acid and deionized water, a method of sterilizing a ultrapure water delivery system using the sterilizing composition and hot water, and a ultrapure water delivery system which is sterilized using the sterilizing composition and hot water for usage of semiconductor device fabrication process. The method of sterilizing the ultrapure water delivery system comprises the steps of sterilizing OR-Polisher and MB-Polisher in the ultrapure water delivery system comprising a pure water tank, a heat exchanger, Ultraviolet-sterilizer, OR-Polisher and MB-Polisher, and a ultrafilter, etc. by supplying hot water (hot water sterilization step), and sterilizing the pure water tank, the heat exchanger, Ultraviolet-sterilizer, and the ultrafilter, etc. of the ultrapure water delivery system by circulating the deionized water including a sterilizer (sterilizer sterilization step).