Locating system for use in vacuum

This invention is related to a locating system for use in vacuum for locating an object, including: an X-Y-theta platform capable of moving in X, Y, and theta directions, so as to locate the position and/or orientation of the object along the X, Y, and theta axes. The platform includes therein a rot...

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Bibliographische Detailangaben
1. Verfasser:	TSENG, WEN-SHOU
Format:	Patent
Sprache:	eng
Schlagworte:	COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS TRANSPORTING
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