DRAM having COB structure and its fabrication method

A DRAM having a COB structure according to the invention including a semiconductor substrate formed with a diffusion layer, a word line formed on the semiconductor substrate, an interlayer insulating film formed on the word line, a capacitor contact formed at the interlayer insulating film and conne...

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Bibliographische Detailangaben
1. Verfasser: KAWAZOE, TAKAYUKI
Format: Patent
Sprache:eng
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