Protective layer for laser blown fuses

A protective layer protects a fuse in an integrated circuit from incidental damage during laser deleting of an adjacent fuse. This approach allows very small fuse pitch applications, e.g., for redundancy activation.

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Hauptverfasser: DINKEL, BETTINA, MITWALSKY, ALEXANDER R, GALL, MARTIN
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Sprache:eng
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creator DINKEL, BETTINA
MITWALSKY, ALEXANDER R
GALL, MARTIN
description A protective layer protects a fuse in an integrated circuit from incidental damage during laser deleting of an adjacent fuse. This approach allows very small fuse pitch applications, e.g., for redundancy activation.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Protective layer for laser blown fuses
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