Semiconductor wafer having alignment marks for a tungsten plug process and a method of manufacture therefore

The present invention provides a semiconductor wafer having a substrate with an active region and an inactive region located therein and that comprises a dielectric substrate located over the active and inactive regions, and an alignment mark located in the dielectric substrate over the inactive reg...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WILLIAMS, JOHN DALE, STONE, DOUGLAS ROY, RYAN, JOHN L, LIU, RUICHEN, YANG, TUNGSHENG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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