Analytic method of yield loss for yield rate management system

Analytic method of yield loss for yield rate management system

An analytic method of yield loss for yield rate management system useful for the semiconductor production line comprises first of all working out a yield loss curve proximity, then counting the number of defective die in each manufacturing step and plotting a defective die curve proximity; making a...

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Hauptverfasser: CHANG, WENNG, CHANG, CHAO-HSIN, YANG, JUN-DE, YEH, RANN-SHYAN
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Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator CHANG, WENNG
CHANG, CHAO-HSIN
YANG, JUN-DE
YEH, RANN-SHYAN
description An analytic method of yield loss for yield rate management system useful for the semiconductor production line comprises first of all working out a yield loss curve proximity, then counting the number of defective die in each manufacturing step and plotting a defective die curve proximity; making a comparison of the close correlation between two curves, finding the critical manufacturing steps relevant to the yield rate, plotting curve proximity on the yield loss numbers and the total number of defective dies in the critical steps, comparing the correlation of the two curves and removing one critical step if there is no obvious correlation, repeating analysis steps till the major defective steps affecting yield rate are identified, and finally production line production line manager adjusting the processing conditions of the machines corresponding to the major defective steps to increase the semiconductor product yield rate.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Analytic method of yield loss for yield rate management system
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