Semiconductor device and semiconductor memory device

A semiconductor device of embodiments includes: a first electrode; a second electrode; an oxide semiconductor layer provided between the first electrode and the second electrode and including a first region, a second region, and a third region between the first region and the second region; a gate e...

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Hauptverfasser: MATSUO, KAZUHIRO, KABUYANAGI, SHOICHI, TANAKA, MASAYUKI, TAKAHASHI, KOTA, FUJII, SHOSUKE, TORATANI, KENICHIRO, TODA, MASAYA, MORIYAMA, WAKAKO
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creator MATSUO, KAZUHIRO
KABUYANAGI, SHOICHI
TANAKA, MASAYUKI
TAKAHASHI, KOTA
FUJII, SHOSUKE
TORATANI, KENICHIRO
TODA, MASAYA
MORIYAMA, WAKAKO
description A semiconductor device of embodiments includes: a first electrode; a second electrode; an oxide semiconductor layer provided between the first electrode and the second electrode and including a first region, a second region, and a third region between the first region and the second region; a gate electrode facing the third region; a first insulating layer facing the first region; a second insulating layer facing the second region; and a gate insulating layer between the gate electrode and the oxide semiconductor layer, containing oxygen (O) and at least one metal element selected from a group consisting of Al, Hf, Zr, La, Y, Zn, In, Sn, and Ga, and having a chemical composition different from that of the oxide semiconductor layer.
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title Semiconductor device and semiconductor memory device
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