Centering device, centering method and substrate processing apparatus

A substrate supported on a substrate support is surrounded by a first contact member located at a first reference position, a second contact member located at a second reference position and a third contact member located at a third reference position in the horizontal plane. These three contact mem...

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Bibliographische Detailangaben

Hauptverfasser:	NEMOTO, SHUHEI, KAJINO, ITSUKI, MINAMI, SHOYO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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