Vaporizer and liquid material vaporizing device

A vaporizer includes a vaporization chamber in which a liquid material is heated and vaporized and a heat exchange element arranged in the vaporization chamber. The vaporization chamber has a groove in its inner surface. This helps improve vaporization performance of the liquid material and the vapo...

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Bibliographische Detailangaben
1. Verfasser: NISHIWAKI, KEISUKE
Format: Patent
Sprache:chi ; eng
Schlagworte:
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