Semiconductor device

A semiconductor device includes a substrate, a chip region in the substrate, a scribe lane region in the substrate, first active patterns in the chip region, a first device isolation pattern on the first active patterns, second active patterns in the scribe lane region, and a second device isolation...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOON, IL-YOUNG, PARK, JONG-HYUK, JOO, BYUNG-SOO, KIM, SEONG-EUN, LEE, YANG-HEE, KWON, BYOUNG-HO, JANG, WOO-HYUK, KIM, SU-JEONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INFORMATION STORAGE PHYSICS STATIC STORES
Online-Zugang:	Volltext bestellen
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