Semiconductor measurement apparatus

A semiconductor measurement apparatus includes an illuminator configured to output light having a first wavelength band and light having a second wavelength band, different from the first wavelength band, a stage on which a test object is positioned, a camera configured to receive light reflected or...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AHN, JIN-WOO, HWANG, EUN-SOO, LEE, JAE-WON, LEE, DONG-GUN, OH, JUN-TAEK
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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