Substrate analysis system

A substrate analysis system includes a load-lock module configured to load or unload a substrate on which a pattern layer is formed; a milling module configured to form a milling surface from which at least a portion of the pattern layer is removed; a depth measuring module configured to measure a m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK, HYE-NOK, CHO, YUN-JE, CHO, JUNG-HEE, HWANG, YUN, KIM, JI-WOONG, LEE, MYUNG-JUN, PARK, JONG-HYEOK, KIM, KWANG-RAK, WANG, JEONG-HYEON
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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