Temperature control system, control system, and method for controlling plant having process chamber

Temperature control system, control system, and method for controlling plant having process chamber

Temperature control systems and methods for a thermal reactor having a process chamber, the control system comprising a first control loop comprising a first Model-Based Predictive Controller (MBPC) and a second control loop comprising a second MBPC, wherein the first and second MBPC are provided wi...

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Hauptverfasser: LIU, ZHENDUO, OOSTERLAKEN, THEODORUS G.M
Format: Patent
Sprache:chi ; eng
Schlagworte:
CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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creator LIU, ZHENDUO
OOSTERLAKEN, THEODORUS G.M
description Temperature control systems and methods for a thermal reactor having a process chamber, the control system comprising a first control loop comprising a first Model-Based Predictive Controller (MBPC) and a second control loop comprising a second MBPC, wherein the first and second MBPC are provided with predictive models representing the behavior of the thermal reactor.
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subjects CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
title Temperature control system, control system, and method for controlling plant having process chamber
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