High performance semiconductor grade dimethylaluminum chloride

Novel high purity dimethylaluminium chloride compositions are provided that are suitable for semiconductor applications, such as atomic layer etch and aluminum ion implantation. The reduction or minimization of specified gaseous impurities allows the vapor phase of the DMAC to have purity levels of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SINHA, ASHWINI K, SMITH, STANLEY M, BYL, OLEG, SPURGEON, LAURENCE E, HEIDERMAN, DOUGLAS C
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY ORGANIC CHEMISTRY SEMICONDUCTOR DEVICES
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