Processing liquid, method for treating object to be treated, and method for manufacturing semiconductor device wherein the processing liquid is excellent in inhibiting corrosions of Cu and also excellent in removing organic residues

The present invention provides a processing liquid that is excellent in inhibiting corrosions of Cu and also excellent in removing organic residues. The processing liquid contains a reducing agent, and at least one specific compound selected from the group consisting of dehydroascorbic acid, 2,3-dik...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OUCHI, NAOKO, KAMIMURA, TETSUYA, MATSUMOTO, HANAE, MURO, NAOTSUGU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES BASIC ELECTRIC ELEMENTS CANDLES CHEMISTRY DETERGENT COMPOSITIONS DETERGENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FATTY ACIDS THEREFROM METALLURGY RECOVERY OF GLYCEROL RESIN SOAPS SEMICONDUCTOR DEVICES SOAP OR SOAP-MAKING USE OF SINGLE SUBSTANCES AS DETERGENTS
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