Substrate transport apparauts and method therefor

A substrate transport apparatus including, a torsional motion driver member having an exterior perimeter circumscribing an axis of rotation of the torsional motion driver member, and a torsional motion follower member including a body portion and a bearing collar rotatably coupled to the body portio...

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Bibliographische Detailangaben
Hauptverfasser:	TASHJIAN, BLAKE R, BUSSIERE, CHRISTOPHER A
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING BRAKES CHAMBERS PROVIDED WITH MANIPULATION DEVICES CLUTCHES COUPLINGS FOR TRANSMITTING ROTATION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HAND TOOLS HEATING LIGHTING MANIPULATORS MECHANICAL ENGINEERING PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES THERMAL INSULATION IN GENERAL TRANSPORTING WEAPONS
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