Semiconductor processing system and method of operating the same and non-transitory computer-readable medium

A semiconductor processing chamber may process wafers by submerging the wafers in a liquid. To determine when the liquid is free of disturbances or contaminants and thus ready to receive the next wafer, a camera may be positioned to capture images of the liquid after a wafer has been removed from th...

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Bibliographische Detailangaben

Hauptverfasser:	IGO, JOHN, KLOCKE, JOHN L
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS THEREFOR CALCULATING CHEMISTRY COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PHYSICS PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
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