Semiconductor processing system and method of operating the same and non-transitory computer-readable medium
A semiconductor processing chamber may process wafers by submerging the wafers in a liquid. To determine when the liquid is free of disturbances or contaminants and thus ready to receive the next wafer, a camera may be positioned to capture images of the liquid after a wafer has been removed from th...
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| creator | IGO, JOHN KLOCKE, JOHN L |
| description | A semiconductor processing chamber may process wafers by submerging the wafers in a liquid. To determine when the liquid is free of disturbances or contaminants and thus ready to receive the next wafer, a camera may be positioned to capture images of the liquid after a wafer has been removed from the liquid. A controller may provide the images of the liquid to a neural network to determine when the liquid is ready based on an output of the neural network. The neural network may be trained to identify disturbances, such as ripples, bubbles, or contaminants in the liquid. The controller may then begin controlling the next semiconductor process and submerge the next wafer. |
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| language | chi ; eng |
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| subjects | APPARATUS THEREFOR CALCULATING CHEMISTRY COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PHYSICS PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS |
| title | Semiconductor processing system and method of operating the same and non-transitory computer-readable medium |
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