Method for inhibiting formable material evaporation, system for inhibiting evaporation, and method of making an article

A method of inhibiting evaporation of a formable material on a substrate, the method comprising holding the substrate with a substrate chuck, the substrate chuck being positioned within a central opening of a frame such that the frame surrounds at least a portion of the substrate chuck, supplying th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CONE, CRAIG WILLIAM, SHACKLETON, STEVEN C, YE, ZHENG-MAO, KONDO, HIROYUKI, FLETCHER, EDWARD BRIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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