Electron microscope, electron source for electron microscope, and methods of operating an electron microscope
An electron microscope (100) is described. The electron microscope comprises an electron source (110) for generating an electron beam, a condenser lens (130) for collimating the electron beam downstream of the electron source, and an objective lens (140) for focusing the electron beam onto a specime...
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| Format: | Patent |
| Sprache: | chi ; eng |
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