Backside routing implementation in SRAM arrays

Various implementations of backside and topside routing of bitlines and wordlines in memory arrays are disclosed. Bitlines in backside and topside metal layers may be alternated between adjacent bit cells in a memory array. Alternating the location of the bitlines between bit cells in the memory arr...

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Hauptverfasser: BHATIA, AJAY, ABU-RAHMA, MOHAMED H, OLIVA, ANTONIETTA, NAZAR, SHAHZAD
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ABU-RAHMA, MOHAMED H
OLIVA, ANTONIETTA
NAZAR, SHAHZAD
description Various implementations of backside and topside routing of bitlines and wordlines in memory arrays are disclosed. Bitlines in backside and topside metal layers may be alternated between adjacent bit cells in a memory array. Alternating the location of the bitlines between bit cells in the memory array may reduce bitline capacitance in a memory array. Placing wordlines in backside metal layers may allow dual wordlines to be implemented across a span of bit cells in a memory array. The dual wordlines may be alternately connected to adjacent bit cells, thereby allowing selective toggling of bit cells based on the wordline transmitting a control signal.
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title Backside routing implementation in SRAM arrays
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