Communication node to interface between evaluation systems and a manufacturing system

An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring...

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Hauptverfasser:	KRIL, THORSTEN, HOWELLS, MICHAEL, NAGENDRA, HEMANTH KONANUR, SASAN, JATINDER
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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creator	KRIL, THORSTEN HOWELLS, MICHAEL NAGENDRA, HEMANTH KONANUR SASAN, JATINDER
description	An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.
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fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TW202340885A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TW202340885A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TW202340885A3</originalsourceid><addsrcrecordid>eNqNzMEKgkAUheHZtIjqHW4PIIgWuBVJegCjpdz0GAPOHXHuFL19Qj5Aq7P4P87W3CrvXBTbsVovJL4HqScrinngDvSAvgEhvHiMPxQ-QeECsfTE5FjiIjXOVp5r25vNwGPAYd2dOdaXprommHyLMC3HAm2be5Zm-SktinOZ_2O-QXc6Jw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Communication node to interface between evaluation systems and a manufacturing system</title><source>esp@cenet</source><creator>KRIL, THORSTEN ; HOWELLS, MICHAEL ; NAGENDRA, HEMANTH KONANUR ; SASAN, JATINDER</creator><creatorcontrib>KRIL, THORSTEN ; HOWELLS, MICHAEL ; NAGENDRA, HEMANTH KONANUR ; SASAN, JATINDER</creatorcontrib><description>An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; PHYSICS ; REGULATING ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20231016&DB=EPODOC&CC=TW&NR=202340885A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20231016&DB=EPODOC&CC=TW&NR=202340885A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KRIL, THORSTEN</creatorcontrib><creatorcontrib>HOWELLS, MICHAEL</creatorcontrib><creatorcontrib>NAGENDRA, HEMANTH KONANUR</creatorcontrib><creatorcontrib>SASAN, JATINDER</creatorcontrib><title>Communication node to interface between evaluation systems and a manufacturing system</title><description>An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>PHYSICS</subject><subject>REGULATING</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNzMEKgkAUheHZtIjqHW4PIIgWuBVJegCjpdz0GAPOHXHuFL19Qj5Aq7P4P87W3CrvXBTbsVovJL4HqScrinngDvSAvgEhvHiMPxQ-QeECsfTE5FjiIjXOVp5r25vNwGPAYd2dOdaXprommHyLMC3HAm2be5Zm-SktinOZ_2O-QXc6Jw</recordid><startdate>20231016</startdate><enddate>20231016</enddate><creator>KRIL, THORSTEN</creator><creator>HOWELLS, MICHAEL</creator><creator>NAGENDRA, HEMANTH KONANUR</creator><creator>SASAN, JATINDER</creator><scope>EVB</scope></search><sort><creationdate>20231016</creationdate><title>Communication node to interface between evaluation systems and a manufacturing system</title><author>KRIL, THORSTEN ; HOWELLS, MICHAEL ; NAGENDRA, HEMANTH KONANUR ; SASAN, JATINDER</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW202340885A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>PHYSICS</topic><topic>REGULATING</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>KRIL, THORSTEN</creatorcontrib><creatorcontrib>HOWELLS, MICHAEL</creatorcontrib><creatorcontrib>NAGENDRA, HEMANTH KONANUR</creatorcontrib><creatorcontrib>SASAN, JATINDER</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KRIL, THORSTEN</au><au>HOWELLS, MICHAEL</au><au>NAGENDRA, HEMANTH KONANUR</au><au>SASAN, JATINDER</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Communication node to interface between evaluation systems and a manufacturing system</title><date>2023-10-16</date><risdate>2023</risdate><abstract>An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.</abstract><oa>free_for_read</oa></addata></record>
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language	chi ; eng
recordid	cdi_epo_espacenet_TW202340885A
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subjects	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
title	Communication node to interface between evaluation systems and a manufacturing system
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-02T23%3A48%3A56IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KRIL,%20THORSTEN&rft.date=2023-10-16&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ETW202340885A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true