Far IR sensing device and manufacturing method thereof

A far infrared (IR) sensing device includes a substrate, a light absorption layer, a sensing layer, a conductive layer, a plurality of pillars, an upper electrode, and a joint structure. The light absorption layer is disposed on the substrate, and the sensing layer is disposed in the light absorptio...

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Bibliographische Detailangaben

Hauptverfasser:	CHEN, HWI-HUANG, CHANG, JIN-WEI, HUNG, JUNG-KAI, CHEN, WEN-JI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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