Substrate transfer method

The invention provides a substrate transfer method, which includes defining a plurality of substrates stored in a substrate storage area as working substrates and temporary storage substrates. A robotic arm takes out one of the working substrates from the substrate storage area, transfers the workin...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	LIN, JINGNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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